JPH055302B2 - - Google Patents
Info
- Publication number
- JPH055302B2 JPH055302B2 JP12716885A JP12716885A JPH055302B2 JP H055302 B2 JPH055302 B2 JP H055302B2 JP 12716885 A JP12716885 A JP 12716885A JP 12716885 A JP12716885 A JP 12716885A JP H055302 B2 JPH055302 B2 JP H055302B2
- Authority
- JP
- Japan
- Prior art keywords
- reflected light
- light
- defect
- defects
- reflectance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007547 defect Effects 0.000 claims description 54
- 239000000463 material Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 23
- 238000007689 inspection Methods 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 13
- 230000010287 polarization Effects 0.000 claims description 13
- 238000001028 reflection method Methods 0.000 claims description 8
- 230000002950 deficient Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12716885A JPS61286740A (ja) | 1985-06-13 | 1985-06-13 | 表面欠陥検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12716885A JPS61286740A (ja) | 1985-06-13 | 1985-06-13 | 表面欠陥検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61286740A JPS61286740A (ja) | 1986-12-17 |
| JPH055302B2 true JPH055302B2 (en]) | 1993-01-22 |
Family
ID=14953339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12716885A Granted JPS61286740A (ja) | 1985-06-13 | 1985-06-13 | 表面欠陥検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61286740A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005345578A (ja) * | 2004-06-01 | 2005-12-15 | Moritex Corp | 撮像装置 |
-
1985
- 1985-06-13 JP JP12716885A patent/JPS61286740A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61286740A (ja) | 1986-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |